Kugadzirwa kwe6N (≥99.9999% purity) ultra-high-purity sulfur kunoda kudistillwa kwezvikamu zvakawanda, kunyudzwa kwakadzika, uye kusefa kwakachena kwazvo kubvisa simbi shoma, tsvina yeorganic, uye tunhu tudiki. Pasi apa pane maitiro eindasitiri anosanganisira kudistillwa kwevacuum, kucheneswa ne microwave, uye matekinoroji ekugadzirisa mushure mekurapa.
I. Kurapa Zvinhu Zvisina Kuchena Uye Kubviswa Kwetsvina
1. Kusarudzwa Kwezvinhu Zvisina Kugadzirwa uye Kurapwa Kwepamberi
- Zvinodiwa: Kuchena kwekutanga kwesarufa ≥99.9% (giredhi re3N), tsvina yese yesimbi ≤500 ppm, huwandu hwekabhoni yeorganic ≤0.1%.
- Kunyunguduka Kunobatsira muMicrowave:
Sarufa isina kuchena inogadziriswa mu microwave reactor (2.45 GHz frequency, 10–15 kW simba) pa 140–150°C. Kutenderera kwe dipole kunokonzerwa ne microwave kunoita kuti kunyungudike nekukurumidza uku kuchiparadza tsvina ye organic (semuenzaniso, tar compounds). Nguva yekunyunguduka: maminetsi 30–45; kudzika kwekupinda mu microwave: 10–15 cm - Kushambidza Mvura Yakabviswa Maion:
Sarufa yakanyungudutswa inosanganiswa nemvura yakasanganiswa (resistivity ≥18 MΩ·cm) pachiyero che1:0.3 mass mu stirred reactor (120°C, 2 bar pressure) kweawa imwe chete kubvisa munyu unonyunguduka mumvura (semuenzaniso, ammonium sulfate, sodium chloride). Chikamu chemvura chinobviswa uye chinodzokororwazve kwe2-3 cycles kusvika conductivity yasvika ≤5 μS/cm.
2. Kusvina uye Kusefa kweMatanho Akawanda
- Kunyudzwa kweDiatomaceous Earth/Activated Carbon:
Nyika ine diatomaceous (0.5–1%) uye activated carbon (0.2–0.5%) zvinowedzerwa kune sarufa yakanyungudutswa pasi pekuchengetedzwa kwenitrogen (130°C, kusanganiswa kwemaawa maviri) kuti zvinyungudike simbi dzakaomarara uye zvakasara zve organics. - Kusefa Kwakanyatsonaka:
Kusefa kwematanho maviri uchishandisa mafirita ane titanium sintered (saizi yepore ye0.1 μm) pa ≤0.5 MPa system pressure. Kuwanda kwezvikamu zvepashure pekusefa: ≤10 particles/L (saizi >0.5 μm).
II. Maitiro eKunyungudutsa Vacuum muMatanho Akawanda
1. Kubviswa Kwetsvina Yesimbi (Kubviswa Kwetsvina Yesimbi)
- Midziyo: Koramu yekudiridza ye quartz yakachena kwazvo ine 316L stainless steel structure packing (≥15 theoretical plates), vacuum cleaner ≤1 kPa.
- MaParamita Ekushanda:
- Kupisa Kwekudya: 250–280°C (sarufa inofashaira pa444.6°C kana yamanikidzwa; vacuum inoderedza kufashaira kusvika pa260–300°C).
- Chiyero cheReflux: 5:1–8:1; kuchinja-chinja kwetembiricha pamusoro pekoramu ≤±0.5°C.
- Chigadzirwa: Kuchena kwesarufa yakavharidzirwa ≥99.99% (giredhi re4N), tsvina yese yesimbi (Fe, Cu, Ni) ≤1 ppm.
2. Kubviswa kweMamorekuru eChipiri (Kubviswa kweKusvibiswa kweOrganic)
- Midziyo: Muchina wekubvisa mamorekuru une mukaha we10–20 mm wekubuda kwemvura nekukonzeresa, tembiricha yekubuda kwemvura 300–320°C, vacuum ≤0.1 Pa.
- Kuparadzana Kwekusachena:
Zvinhu zve organic zvinofashaira zvishoma (semuenzaniso, thioethers, thiophene) zvinopfuudzwa uye zvinobviswa, nepo tsvina inofashaira zvakanyanya (semuenzaniso, polyaromatics) ichiramba iri mumarara nekuda kwekusiyana kwenzira yakasununguka yemamorekuru. - Chigadzirwa: Kuchena kwesarufa ≥99.999% (giredhi re5N), kabhoni yeorganic ≤0.001%, mwero wezvisaririra <0.3%.
3. Kuchenesa Nzvimbo Yepamusoro (Kuwana Kuchena kwe6N)
- Midziyo: Muchina wekuchenesa nzvimbo wakatwasuka une tembiricha yenzvimbo dzakawanda (± 0.1°C), kumhanya kwekufamba kwenzvimbo 1–3 mm/awa.
- Kusarura:
Kushandisa ma coefficients ekuparadzanisa (K=Csolid/CliquidK=Cyakasimba/Cmvura), nzvimbo 20–30 inopfuudza simbi dzakanyatsogadzirwa (As, Sb) pamucheto we ingot. 10–15% yekupedzisira ye ingot yesarufa inoraswa.
III. Kugadzirwa Mushure meKurapwa uye Kuchenesa Zvakanyanya
1. Kubviswa kwezvinyungudutsa zvakachena zvakanyanya
- Kubviswa kweEther/Carbon Tetrachloride:
Sarufa inosanganiswa ne chromatographic-grade ether (1:0.5 volume ratio) pasi pe ultrasonic assistance (40 kHz, 40°C) kwemaminitsi makumi matatu kubvisa trace polar organics. - Kudzoreredza Zvinyungudutsi:
Kunyudzwa kwemuseve wemamorekuru uye kunyudzwa kwevacuum kunoderedza masara e solvent kusvika ku ≤0.1 ppm.
2. Kuchinjana kweIon neUltrafiltration
- PTFE Membrane Ultrafiltration:
Sarufa yakanyungudutswa inoseferwa kuburikidza ne 0.02 μm PTFE membranes pa 160–180°C uye ≤0.2 MPa pressure. - MaIon Exchange Resins:
Maresini eChelating (semuenzaniso, Amberlite IRC-748) anobvisa maion esimbi e ppb-level (Cu²⁺, Fe³⁺) pahuwandu hwekuyerera kwe 1–2 BV/h.
3. Kugadzira Nzvimbo Yakachena Zvakanyanya
- Kubviswa kwegesi isina simba:
Mukamuri rekushambidza reClass 10, sarufa yakanyungudutswa inosanganiswa nenitrogen (0.8–1.2 MPa pressure) mu 0.5–1 mm spherical granules (hunyoro <0.001%). - Kurongedza Vacuum:
Chigadzirwa chekupedzisira chinovharwa nearuminiyamu mufirimu ine ultra-pure argon (≥99.9999%) kudzivirira oxidation.
IV. Magadzirirwo Ezvinhu Zvinokosha
| Danho reKugadzirisa | Tembiricha (°C) | Kumanikidzwa | Nguva/Kumhanya | Midziyo Yepakati |
| Kunyunguduka kweMicrowave | 140–150 | Zviri munzvimbo | Maminetsi 30–45 | Chinogadzirisa microwave |
| Kushambidza Mvura Yakabviswa Maion | 120 | mabhawa maviri | Awa imwe chete/kutenderera | Reactor Yakakurudzirwa |
| Kunyungudika kweMolecular | 300–320 | ≤0.1 Pa | Kuenderera mberi | Molecular Distiller yeNzira Pfupi |
| Kuchenesa Nzvimbo | 115–120 | Zviri munzvimbo | 1–3 mm/awa | Muchina wekuchenesa nzvimbo yakatambanuka |
| Kusefa kwePTFE Ultra | 160–180 | ≤0.2 MPa | Kuyerera kwe1–2 m³/awa | Sefa yekupisa kwakanyanya |
| Kubviswa kweNitrogen | 160–180 | 0.8–1.2 MPa | 0.5–1 mm granules | Shongwe yeAtomization |
V. Kudzora Hunhu uye Kuedzwa
- Kuongorora Kusachena Kwekutevera:
- GD-MS (Glow Discharge Mass Spectrometry)Inoona simbi pa ≤0.01 ppb.
- Muongorori weTOCInoyera kabhoni yeorganic ≤0.001 ppm.
- Kudzora Saizi yeZvidimbu:
Laser diffraction (Mastersizer 3000) inoita kuti D50 ishanduke ≤±0.05 mm. - Kuchena Kwepamusoro:
XPS (X-ray Photoelectron Spectroscopy) inosimbisa ukobvu hwepamusoro pe oxide ≤1 nm.
VI. Kuchengetedzeka uye Kugadzira Zvakatipoteredza
- Kudzivirira Kuputika:
Zvishandiso zve infrared fire detectors uye masisitimu enitrogen flooding zvinochengetedza huwandu hweokisijeni <3% - Kudzora Kubuda Kwemhepo:
- Magasi eAcidKukwesha NaOH ine nhanho mbiri (20% + 10%) kunobvisa ≥99.9% H₂S/SO₂.
- VOC: Zeolite rotor + RTO (850°C) inoderedza mahydrocarbon asiri emethane kusvika ku ≤10 mg/m³.
- Kudzokorodza Marara:
Kudzikiswa kwekupisa kwakanyanya (1200°C) kunodzosa simbi; huwandu hwesarufa hwasara pasi pe0.1%.
VII. Mametriki eTekinoroji neUpfumi
- Kushandiswa kweSimba: 800–1200 kWh magetsi uye 2–3 matani emhepo inopfungaira patani ye6N sarufa.
- Goho: Kudzoserwa kwesarufa ≥85%, mwero wezvisaririra <1.5%.
- MutengoMutengo wekugadzira ~120,000–180,000 CNY/tani; mutengo wemusika 250,000–350,000 CNY/tani (giredhi resemiconductor).
Maitiro aya anogadzira 6N sarufa ye semiconductor photoresists, III-V compound substrates, nezvimwe zvinoshandiswa pakugadzira. Kutarisa kwenguva chaiyo (semuenzaniso, LIBS elemental analysis) uye ISO Class 1 cleanroom calibration zvinovimbisa kunaka kwakafanana.
Mashoko emuzasi
- Referensi 2: Maitiro Ekuchenesa Sulfur Yeindasitiri
- Referensi 3: Matekiniki Epamusoro Ekusefa muUinjiniya hweMakemikari
- Referensi 6: Bhuku Rekushandisa Zvinhu Zvakachena Kwazvo
- Tsanangudzo 8: Maitiro Ekugadzira Makemikoro Emhando Yesekonductor
- Chirevo 5: Kugadzirisa Kunyungudutsa Kwevacuum
Nguva yekutumira: Kubvumbi-02-2025